INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 164)

MDC-360 DEPOSITION CONTROLLER
MATERIAL CONT’D
Maximum Power
Max Power Alarm Delay
Minimum Power
Rate Deviation Attention
Rate Deviation Alarm
Rate Deviation Abort
Sample Dwell %
Sample Period
Crystal Fail
Backup Sensor #
Backup Crystal #
Backup Tooling Factor
Material Password
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