INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 51)

MDC-360 DEPOSITION CONTROLLER
4-19 PROGRAMMING AND CONTROLLER SETUP
ds= Distance from source to substrate.
Empirical calibration of the tooling factor is described in Section 10.6.2.
9. Proportional Gain (0 to 9999)
This parameter is the proportional gain factor for the source power control loop.
10. Integral Time constant (0 to 99.9 sec)
This parameter is the system time constant.
11. Derivative Time constant (0 to 99.9 sec)
This parameter is the system dead time.
12. Rise To Soak Time (0 to 9:59:59)
This parameter sets the time interval for the source power to ramp up from zero t
the power level set in Soak Power parameter. It should be long enough for the
material to have time to reach equilibriu o
m temperature without spitting, or in the
unnecessary thermal shock.
vel during the Soak state. The Soak
s
e parameter defines the time duration of the Soak state. It is used in
he material to fully outgas.
source power to ramp from Soak
d
ine the
cular material.
he Predeposit state. The Predeposit
s the source material to be
stabilized in an orderly manner.
e Predeposit power level, too long a
)
The rate establish
ed to establish the correct source
case of evaporation sources, protected from
13. Soak Power (0.0-99.9%)
This parameter defines the source power le
Power should be established at a level which will assure that the source material i
properly outgassed and prepared for subsequent deposition.
14. Soak Time (0 to 9:59:59)
The Soak Tim
conjunction with the Soak Power to allow t
15. Rise To Predeposit (0 to 9:59:59)
This parameter sets the time interval for the
Power level to the Predeposit Power.
16. Predeposit Power (0.0 to 99.9%)
This parameter defines the source power level during the Predeposit state. This
should be set as close as possible to the power level required to reach the desire
deposition rate. The Manual mode can be used to conveniently determ
Soak and Predeposit power levels of a parti
17. Predeposit Time (0 to 9:59:59)
This parameter defines the time duration of t
Time should be established at a value which allow
brought to the deposit temperature level and
Since evaporation will normally occur at th
Predeposit Time will result in unnecessary buildup of material on the shutter and
unnecessary material loss.
18. Rate Establish Time (0 to 99 seconds
This parameter defines the time limit of the rate establish state.
state occurs before the deposit state and is us