INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 21)

MDC-360 DEPOSITION CONTROLLER
2.3.2 START KEY
The Start key starts a process, starts a layer, or resumes an aborted process. A
green light behind this key indicates the controller is in process. When this key is
pressed the first time a list of stored processes is displayed in the Parameter/Status
window. The up and down arrow keys can be used to move the cursor to the
desired process. Press the Start key again to start that process. Note that in many
cases messages will be displayed in the Parameter/Status window reminding the
operator to check system set up. Follow the prompt.
2.3.3 ABORT KEY
The Abort key drives the MDC-360 into the Abort mode. All source powers are
set to zero and discrete outputs are set to inactive state. A red light behind this
key indicates the controller is in the abort mode.
2.3.4 RESET KEY
The Reset key is used to clear the controller from Abort mode and put it into the
Ready mode. A yellow light behind this key indicates a Ready mode. The Reset
key is inactive during the In Process mode so that a premature exit from the In
Process mode requires an abort.
2.3.5 ZERO KEY
Pressing the Zero key causes the thickness display to go to zero. This key is
active at all times and if pressed during the deposit state will result in a film
thicker than that desired by an amount equal to the thickness displayed at the time
the display was zeroed.
2.3.6 SHUTTER KEY
This key is used to manually open and close all source shutters. The red light is
illuminated when the active source shutter relay is closed. This key is only active
when the controller is in the Process Ready mode.
2.3.7 STATUS KEY
Pressing the Status key will bring up one of the six run-time status screens.
Repeatedly pressing the key will cycle through the different status screens. Refer
to Section 5 for a detailed description of these status screens.
FRONT PANEL DISPLAYS AND CONTROLS 2-3