Process, Process -5 – INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 165

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MDC-360 DEPOSITION CONTROLLER

14.2 PROCESS

Page ___ of ___
Process Number

Process Name

Edit password

Run/View password

Layer #

Material

Thickness (kÅ)

Material Name

SYSTEM:

ENTERED BY:

APPROVED BY:

DATE:

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