Sensor setup, Source setup, Sensor setup -10 – INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 170: Source setup -10
MDC-360 DEPOSITION CONTROLLER
SYSTEM:
ENTERED BY:
APPROVED BY:
DATE:
14.7 SENSOR
SETUP
Sensor #
1 2 3 4
Number of Crystals
1
2
3
4
5
6
7
8
Shutter Relay Type
N.O. N.C. DUAL
Control
MANUAL DIRECT
BCD INDIV.
Drive
UP DOWN FAST INLINE
SNGL STEP DBL STEP
Feedback Type
NO FEEDBACK INDIVIDUAL
BCD SINGLE HOME IN POSITION
Rotator Delay (sec)
14.8 SOURCE
SETUP
Source #
1 2 3 4
Number of Pockets
1
2
3
4
5
6
7
8
Shutter Relay Type
N.O. N.C.
Shutter Delay (sec)
Control
MANUAL DIRECT
BCD INDIV.
Drive
UP DOWN FAST INLINE
SNGL STEP DBL STEP
Feedback Type
NO FEEDBACK INDIVIDUAL
BCD SINGLE HOME IN POSITION
Rotator Delay (sec)
Source Voltage
2.5V 5V 10V