INFICON MDC-360 Thin Film Deposition Controller User Manual
Model mdc-360, Operation and service manual
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OPERATION AND SERVICE MANUAL
MODEL MDC-360
MAXTEK FILM DEPOSITION CONTROLLER
P/N 179800
S/N _____________
MAXTEK, INC.
http://www.maxtekinc.com
5980 Lakeshore Drive, Cypress, CA 90630-3371
Tel: (714) 828-4200
• Fax: (714) 828-4443
Email: [email protected]
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Table of contents
Document Outline
- GENERAL DESCRIPTION
- PURPOSE
- FEATURES
- EXTENSIVE PROGRAM STORAGE
- DYNAMIC MEASUREMENT UPDATE RATE
- SUPERIOR GRAPHICS DISPLAY
- PROGRAM SECURITY
- DESIGNED FOR UNATTENDED OPERATION
- FAIL SAFE ABORTS
- ABORT STATUS RETENTION
- RUN COMPLETION ON CRYSTAL FAILURE
- POWERFUL SYSTEM INTERFACE
- POWER SUPPLY NOISE TOLERANCE
- INTERNATIONAL STANDARD POWER CONNECTOR
- FIELD UPGRADABLE
- SPECIFICATIONS
- ACCESSORIES
- FRONT PANEL DISPLAYS AND CONTROLS
- BENCH CHECKOUT & INSPECTION
- PROGRAMMING AND CONTROLLER SETUP
- OPERATING THE MDC-360
- SIGN-ON SCREEN
- STARTING A NEW PROCESS
- STARTING A NEW LAYER
- RESUMING AN ABORTED OR HALTED PROCESS
- STATUS DISPLAYS
- VIEWING RESULTS
- MODES
- STATES
- TROUBLE, ERROR AND WARNING MESSAGES
- DESCRIPTION
- MIN RATE&MAX POWER
- MAX RATE&MIN POWER
- SYSTEM SETUP MEMORY CORRUPTED
- PROCESS MEMORY CORRUPTED
- MATERIAL MEMORY CORRUPTED
- RATE EST. ERROR
- CRYSTAL FAILURE
- SOURCE FAULT
- SENSOR FAULT
- TIME POWER
- RATE DEV. ALARM
- ALARM ACTION
- CRYSTAL MARGINAL
- RATE DEV. ALERT
- MAX POWER ALERT
- MIN POWER ALERT
- ALERT ACTION
- XTAL FAIL SWITCH
- XTAL MRGN SWITCH
- RATE DEV. ATTEN
- MAXIMUM POWER
- MINIMUM POWER
- CHANGE POCKET...
- CHANGE CRYSTAL...
- ATTENTION ACTION
- DESCRIPTION
- TUNING THE MDC-360 CONTROL LOOP
- INPUT/OUTPUT CHARACTERISTICS
- CONTROLLER INSTALLATION
- SYSTEM INSTALLATION
- THEORY OF OPERATION
- COMPUTER INTERFACE
- REPAIR AND MAINTENANCE
- APPENDIX A
- APPENDIX B – PARAMETER TEMPLATES