INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 70

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MDC-360 DEPOSITION CONTROLLER

4-38 PROGRAMMING AND CONTROLLER SETUP

BCD

- Binary Coded Decimal position feedback. This feedback type

uses binary coding to indicate the pocket position. Inputs are numbered most
significant bit first. For example, an eight pocket source would use three

ts would be false. With pocket

true and input three would be

NO FEEDBACK - No pocket position feedback is used.

Table of Input states for BCD feedback type.

Pocket
Number

Input
BCD2

Input
BCD1

Input
BCD0

inputs. With pocket one in position, all inpu
four in position, inputs one and two would be
false.

SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when pocket one is in position.

IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.

1 OPEN

OPEN

OPEN

2 OPEN

OPEN

GND

3 OPEN

GND

OPEN

4 OPEN

GND

GND

5 GND

OPEN

OPEN

6 GND

OPEN

GND

7 GND

GND

OPEN

8 GND

GND

GND

7. Rotator Delay (0 to 99 seconds)

This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.) this parameter tells
the controller how long to wait, on the assumption the pocket will get into
position. If position feedback is provided, this parameter tells the controller how
long it should wait for the pocket to reach its target position before it issues a
Source Fault message.

8. Source Voltage (2.5V, 5.0V, 10V)

This parameter sets the upper voltage range for the source control output. The
lower voltage range is always 0. For example, selecting 10 for this parameter sets
the source control voltage range from 0 to 10 volts.

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