INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 78)

MDC-360 DEPOSITION CONTROLLER
5-4
Sample Cr Process Ready
5
P
o
w
e
r
% 0 1
Figure 5-6 Power vs. Time Graph
Sample Cr Process Ready
7 1 1 95
2 1 10.0 2 1 99
4 1 99
Source Status Sensor Status
Src# Pckt# Power Snsr# Xtl# Health
1 1 23.
3 1 10.0 3 1 99
4 1 10.0
Figure 5-7 Source/Sensor Status screen
Sample Cr Process Ready
Input State Output State
01>Name F F<
02 F F
03 F F
F F 04
05 F F
06 F F
Figure 5-8 I/O Status Screen
5.6 VIEWING RESULTS
e
or can be downloaded to a PC for permanent storage and/or
review.
The MDC-360 has an optional Internal Data Storage capability that provides
internal storage of real time run data. Stored data can later be viewed through th
four status graphs
OPERATING THE MDC-360