INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 66)

MDC-360 DEPOSITION CONTROLLER
4-34 PROGRAMMING AND CONTROLLER SETUP
sensor head, this parameter would be set to the number of crystals that the sensor
will hold.
2. Shutter Relay type (N.O., N.C., None, Dual)
This parameter defines the shutter relay type used to control the sensor shutter.
The following four relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter a
ator.
t is created.
Dual - Select this type for a dual sensor head. For this type, a “Dual Snsr1&2
, Indiv)
f crystal position control utilized.
tion of the current
t crystal position. A message
BC
controller which accepts Bi
clo
req
sig
iven directly. In this case the
p, Dbl Step)
ect control and only
e
0 will activate this output to increment the sensor head up to the next
n up
the
ller that continuous travel in one direction is not
ctu
None - No sensor shutter outpu
Shtr” output will be created to interface to the shutter actuator.
3. Control (Manual, Direct, BCD
This parameter defines the type o
Manual, as it implies, means not under control of the MDC-360. Under manual
control, the MDC-360 will stop the process upon the comple
layer when the next layer requires a differen
prompting the operator with the number of the crystal required is displayed in the
Parameter/Status window. Once the crystal has been changed, the process is
resumed by pressing the Start key.
D and Indiv are used when control is through an external crystal rotation
nary Coded Decimal inputs or Individual switch
sures to select the crystal. The controller creates the number of outputs
uired to interface with the external controller and set the outputs as required to
nal a crystal
Direct is used when the actuating device is dr
controller creates one or two outputs, one for each available direction, to drive a
motor or solenoid.
4. Drive (Up, Down, Fast, Inline, Sngl Ste
This parameter defines the drive method or direction for Dir
has an effect when Control type is set to Direct. The different settings are
described below.
Up, Down, Fast and Inline - These four settings are typically used with multi-
crystal heads that use a motor to rotate the crystals into position. With Up
selected, the controller will create one output called "SensorN Drive Up". Th
36
position. The down selection works the same except the output is called
"SensorN Drive Dn". With Fast selected, the controller will create both a
and a down output. The 360 will then determine the fastest direction to
target crystal position by activating the appropriate output. The Inline drive
type informs the contro