INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 137)

MDC-360 DEPOSITION CONTROLLER
11-9 COMPUTER INTERFACE
Exa he con terial lis
Chr$(255)+Chr$(254)+Chr$(1
MDC’s message length is li to 249 by ller will return
al list in two messages. The message will contain material names
the second message will contain material na 17-32.
d number of undefined layers (Code #9)
the controller to send the num of undefin yers to the host
er.
: Header, Address, Instruction=9, Length=0, Checksum.
ber of undefined s instructio
255)+Chr$(254)+Chr$(1
ill return a message with llowing fo
ader, Address, Instruction= ngth=2, #Lyrs(2 bytes), Checksum.
ss (Code #10)
troller to send all the ss parame cess# n to the
description of the process parameter list is as follows:
mple: To instruct t troller to send the ma t the computer would
send:
)+Chr$(8)+Chr$(0)+Chr$(247)
Since the
eri
mited tes, the contro
the mat
1-16 and first
mes
10. Sen
Instructs ber ed la
comput
Format
Example: Send num layer n:
Chr$( )+Chr$(9)+Chr$(0)+Chr$(246)
Controller w the fo rmat:
He 9, Le
11. Send proce
Instructs the con proce ters for pro
host computer. A
Parameter Name Length (bytes) Decimal Pt.
Position
Range Units
Process # 1 (0-98) None *
Process name 12 Characters None *
Edit Password 4 Characters None *
View/Run Password 4 Characters None *
Number of Layers 2 (0-998) None *
Total 23 bytes
All of the layer data for process #n wi ow the ab e. Since the
ngth is limited 9 bytes, th r will send the
up to 17 separa ssages depending on the number of
yers in the process. Each message will contain from one to 60 layers. For
ill send the layer data
message
ll foll ove messag
MDC-360’s message le to 24 e controlle
layer data in from one te me
la
example, if the process contains 250 layers, the controller w
in five messages. The first four message will have 60 layers and the last
will have 10 layers. The format of the layer messages is as follows:
Parameter Name Length (bytes) Decimal Pt.
Position
Range Units
Messag ne e Number 1 * (1-17) No
Layer # n Thickness 3 3 (0-999900) Å
Layer # n Material # 1 * (0-31) None