INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 64

Advertising
background image

MDC-360 DEPOSITION CONTROLLER

4-32

Action Name: > <
Conditions :




Valid operators: 1=!, 2=(, 3=), 4=&, 5=|

PROGRAMMING AND CONTROLLER SETUP


In this screen you select the predefined action you would like to take and the
associated condit

0= Add condition, to save

ions. To specify an action, move the markers onto the action

name field and press the Right-arrow key. This will present the Select Defined
Action screen.

Select Defined Action: 01 >No Action <

02 Manual Power

03 Zero Thickness

his screen you can select a predefined action from the list by moving the

sors onto the desired action and pressing Enter. The following is a list of the
defined actions:

Action - No action is taken. The default setting.

nual - Functionally identical to press

04

Reset

Controller

05

Abort

Process

06

Halt

Process

07

TerminateDeposit

to select

08 Hold In State

In t
cur
pre

No

Ma

ing Manual key.

Res

Ab

ickness for the deposit state. Action is

ign

Ho

Ste

Zero - Functionally identical to pressing Zero key.

et - Functionally identical to pressing Reset key.

ort - Functionally identical to pressing Abort key.

Halt - Halts the process, sets active source power to idle, and leaves all other
source powers unchanged.

Terminate Deposit - Triggers the final th

ored if state is not a deposit state.

ld In State - Holds controller in current state.

p From State - Steps controller to next state.

Advertising