Dac setup, Utility setup, Dac setup -11 – INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 171: Utility setup -11

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MDC-360 DEPOSITION CONTROLLER

SYSTEM:

ENTERED BY:

APPROVED BY:

DATE:

14.9 DAC

SETUP

DAC Output #1

… Rate … Rate Dev. … Power … Thickness

DAC Scale #1

… 3 Digit … 2 Digit

DAC Output #2

… Rate … Rate Dev. … Power … Thickness

DAC Scale #2

… 3 Digit … 2 Digit

14.10 UTILITY SETUP

Crystal Frequency

… 2.5 … 3.0 … 5.0 …6.0 …9.0 …10.0

Simulate Mode

… On … Off

Interface Address
(1-32)

Attention Volume
(0-10)

Alert Volume (0-10)

Alarm Volume (0-10)

Data Points/Min
(ppm)

… 30 … 60 … 120 … 300 … 600

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