INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 9)

Table of Figures
FIGURE 2-1 OPERATING DISPLAY........................................................................................ 2-1
FIGURE 2-2 PARAMETER/STATUS DISPLAY ...................................................................... 2-2
FIGURE 2-3 PROGRAMMING SECTION................................................................................ 2-4
FIGURE 2-4 ARROW KEYS...................................................................................................... 2-4
FIGURE 2-5 ALPHANUMERIC KEYBOARD ......................................................................... 2-5
FIGURE 3-1 REMOTE POWER HANDSET ............................................................................. 3-7
FIGURE 4-1 THE MAIN MENU................................................................................................ 4-1
FIGURE 4-2 SELECT PROCESS SCREEN..............................................................................4-14
FIGURE 4-3 DEFINE PROCESS SCREEN ..............................................................................4-14
FIGURE 4-4 SELECT LAYER MATERIAL SCREEN .............................................................4-16
FIGURE 4-5 SELECT MATERIAL SCREEN............................................................................4-16
FIGURE 4-6 DEFINE MATERIAL SCREEN ............................................................................4-17
FIGURE 4-7 SYSTEM SETUP MENU SCREEN .....................................................................4-23
FIGURE 4-8 DISPLAY SETUP SCREEN.................................................................................4-23
FIGURE 4-9 SELECT OUTPUT SCREEN ...............................................................................4-27
FIGURE 4-10 PROGRAM OUTPUT SCREEN ........................................................................4-27
FIGURE 4-11 SENSOR SETUP SCREEN ................................................................................4-33
FIGURE 4-12 SOURCE SETUP SCREEN................................................................................4-36
FIGURE 4-13 DAC SETUP SCREEN .......................................................................................4-39
FIGURE 4-14 UTILITY SETUP SCREEN................................................................................4-39
FIGURE 5-1 SIGN-ON SCREEN ............................................................................................... 5-1
FIGURE 5-2 RUN PROCESS SELECTION SCREEN .............................................................. 5-2
FIGURE 5-3 RATE VS. TIME GRAPH ..................................................................................... 5-3
FIGURE 5-4 RATE DEVIATION VS. TIME GRAPH .............................................................. 5-3
FIGURE 5-5 THICKNESS VS. TIME GRAPH.......................................................................... 5-3
FIGURE 5-6 POWER VS. TIME GRAPH.................................................................................. 5-4
FIGURE 5-7 SOURCE/SENSOR STATUS SCREEN................................................................ 5-4
FIGURE 5-8 I/O STATUS SCREEN .......................................................................................... 5-4
FIGURE 5-9 VIEW RESULTS SCREEN ................................................................................... 5-6
FIGURE 5-10 RATE VS. TIME PROCESS LOG GRAPH ........................................................ 5-6
FIGURE 5-11 TYPICAL PROCESS PROFILE.........................................................................5-13
FIGURE 7-1 PASSIVE INPUT BUFFER CIRCUIT .................................................................. 7-3
FIGURE 7-2 ACTIVE INPUT BUFFER CIRCUIT..................................................................... 7-4
FIGURE 7-3 DAC OUTPUT CIRCUIT...................................................................................... 7-5
FIGURE 7-4 SENSOR INPUT BUFFER CIRCUIT .................................................................. 7-6
FIGURE 7-5 SOURCE OUTPUT DRIVER CIRCUIT............................................................... 7-7
FIGURE 8-1 MDC-360 FRONT PANEL.................................................................................... 8-4
FIGURE 8-2 MDC-360 REAR PANEL ...................................................................................... 8-5
FIGURE 8-3 DAC SOCKET CONNECTOR PIN OUT ............................................................. 8-6
FIGURE 8-4 SOURCE SOCKET CONNECTOR PIN OUT ...................................................... 8-6
FIGURE 8-5 D9S DTE REAR-PANEL RS-232 SOCKET CONNECTOR................................ 8-7
FIGURE 8-6 D37P DISCRETE I/O PLUG CONNECTOR ......................................................... 8-8
FIGURE 8-7 RJ11 FRONT PANEL RS-232 CONNECTOR ..................................................... 8-9
FIGURE 8-8 FRONT PANEL MANUAL POWER CONNECTOR .......................................... 8-9
FIGURE 8-9 MDC-360 TOP VIEW (COVER REMOVED) .....................................................8-10
FIGURE 9-1 SENSOR OSCILLATOR SCHEMATIC ............................................................... 9-4
FIGURE 9-2 SENSOR OSCILLATOR OUTLINE..................................................................... 9-5
FIGURE 9-3 IF-111 INSTRUMENTATION FEEDTHROUGH OUTLINE.............................. 9-6
FIGURE 9-4 SH-102 SENSOR HEAD OUTLINE ..................................................................... 9-7
FIGURE 9-5 TYPICAL SYSTEM INSTALLATION................................................................. 9-8
FIGURE 13-1 PLUG PIN OUT - SOURCE CABLE CONNECTOR.........................................13-1
FIGURE 13-2 PLUG PIN OUT - DAC CABLE CONNECTOR ................................................13-2
FIGURE 15-1 MENU MAP ........................................................................................................15-1
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