INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 151)

MDC-360 DEPOSITION CONTROLLER
11-23 COMPUTER INTERFACE
Parameter Name Length (bytes) Units
Message Number 2 1-1125
Thickness 3 Angstroms
Rate 3 0.1 Angstroms/second
Power 2 0.1 %
Rate Deviation 2 0.1 %
Total 12-242 bytes
Since the MDC’s message length is limited to 249 bytes, a data point set message
l
ta
t.
hich will take up to two
minutes to send. This last message will contain the remaining data point sets to
complete the layer. A message number is included in each message to ensure that
all messages are received and are in order.
Format: Header, Address=1, Instruction=37, Length=3, 1 byte Log#(1-16), 2 byte
Layer#(1-999), Checksum
Example: To instruct the controller to send the layer 1 of process log 5 the
computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(37)+Chr$(3)+Chr$(5)+Chr$(0)+
Chr$(1)+Chr$(209)
39. Remote activation of controller (Code #38)
This instruction initiates a remote action. The possible actions are shown in the
following table:
will contain up to 24 data point sets for a total of 242 bytes. The controller wil
send as many messages as needed to complete the process log layer. To
determine the number of messages to expect, you just divide the number of da
point sets by 24. And, if there are any left over, then add one more to the resul
Very long layers can result in over a 1000 messages w
Remote Action Code Description Action Trigger Type
0 Sound Alarm Action Momentary
1 Sound Alert Action Momentary
2 Sound Attention Action Momentary
3 Step From State Action One Shot
6 Clear Hold in State Action Continuous
5 Set Hold in State Action Continuous
6 Terminate Deposit Action One Shot
7 Halt Process Action One Shot
8 Switch Crystals One Shot
All the momentary actions trigger the action for a 100 millisecond period for each
message received. The one shot actions trigger the action once for each message
received. For example, sending one step from state message would cause the
controller to step into the next state one time. The continuous actions trigger that