INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 19)

MDC-360 DEPOSITION CONTROLLER
2. FRONT PANEL DISPLAYS AND CONTROLS
The front panel is divided into two sections, the operating section and the
programming section. The left half of the panel is devoted to the operating
displays and controls. The right half is used for programming, viewing stored
processes, and displaying the status of the selected process.
2.1 OPERATING DISPLAYS
All of the operating displays are updated ten times per second unless the
controller is in the Abort mode. When in the Abort mode, the values of the
operating displays are held constant so the operator will know the values at the
time of the Abort. The controller will also flash the operating displays while in
Abort to alert the operator.
Figure 2-1 Operating Display
g decimal point is used to display deposition
rate in angstroms per second at a resolution of 0.1 Å/sec from 0 to 99.9 Å/sec, and
c for rates from 100 to 999 Å/sec.
aximum
power with a resolution of 0.1% from 0 to 99.9%. This corresponds to the control
olts.
2.1.3 THICKNESS
decimal point display measured thickness in KÅ
to 999.9 KÅ.
ER
HEALTH %
A two digit display is used to show the health percentage of the sensor crystal in
use. A fresh crystal starts out with a health of 99%.
2.1.1 RATE
A three digit display with a floatin
a resolution of 1.0 Å/se
2.1.2 POWER
A three digit display with a fixed decimal point displays percent of m
voltage range of 0 to 9.99 v
Four digits with an autoranging
with a resolution of 1 Å from 0 to 9.999 KÅ, a resolution of 10 Å from 10.00 KÅ
to 99.99 KÅ and a resolution of 100 Å from 100.0 KÅ
2.1.4 LAYER NUMB
Three digits display the layer number of the current process.
2.1.5 CRYSTAL
FRONT PANEL DISPLAYS AND CONTROLS 2-1