INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 71)

MDC-360 DEPOSITION CONTROLLER
4-39
4.3.3.7 EDIT DAC SETUP
Se p from menu will present the
DA allow eter and its signal range
for each of the two DACs.
lecting Edit DAC Setu
C Setup screen which
the Edit System Setup
s selection of the param
PROGRAMMING AND CONTROLLER SETUP
Figure 4-13 DAC Setup Screen
1. DAC Output (Rate, Rate Dev., Power, Thickness)
One of four system control parameters is chosen for the DAC output. The default
setting is Rate for DAC #1 and Rate Deviation for DAC #2.
2. DAC Scale (2-digit, 3-digit)
Either the two least significant, or the three least significant, digits of the chosen
control parameter are used to represent full scale for the DAC output.
4.3.3.8 EDIT UTILITY SETUP
Selecting the Edit Utility Setup from the Edit System Setup menu will present the
Utility Setup screen. Figure 4-14 shows the first page of this screen. All
parameters are described below.
Figure 4-14 Utility Setup screen
1. Xtal Freq. (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz)
DAC Setup
>Rate <
2 Digit
Utility Setup
Crystal Freq. 6.0 MHz
Simulate mode On
Interface address 01 (1-32)
Attention Volume 01 (0-10)
Alert Volume
01 (0-10)
Alarm Volume 01 (0-10)
Data Points
DAC Output #1
DAC Scale #1
DAC Output #2 Power
DAC Scale #2 2 Digit
/min 60 ppm ↓