Document Outline

• GENERAL DESCRIPTION
  • PURPOSE
  • FEATURES
    • EXTENSIVE PROGRAM STORAGE
    • DYNAMIC MEASUREMENT UPDATE RATE
    • SUPERIOR GRAPHICS DISPLAY
    • PROGRAM SECURITY
    • DESIGNED FOR UNATTENDED OPERATION
    • FAIL SAFE ABORTS
    • ABORT STATUS RETENTION
    • RUN COMPLETION ON CRYSTAL FAILURE
    • POWERFUL SYSTEM INTERFACE
    • POWER SUPPLY NOISE TOLERANCE
    • INTERNATIONAL STANDARD POWER CONNECTOR
    • FIELD UPGRADABLE
  • SPECIFICATIONS
    • MEASUREMENT
    • DISPLAY
    • COMMUNICATION
    • PROGRAM STORAGE CAPACITY
    • PROCESS PARAMETERS
    • MATERIAL PARAMETERS
    • INPUT/OUTPUT CAPABILITY
    • SENSOR PARAMETERS
    • SOURCE PARAMETERS
    • RECORDER PARAMETERS
    • UTILITY SETUP PARAMETER
    • OTHER
  • ACCESSORIES
• FRONT PANEL DISPLAYS AND CONTROLS
  • OPERATING DISPLAYS
    • RATE
    • POWER
    • THICKNESS
    • LAYER NUMBER
    • CRYSTAL HEALTH %
    • TIME TO GO
  • PARAMETER/STATUS DISPLAYS
  • OPERATING CONTROLS
    • MANUAL KEY
    • START KEY
    • ABORT KEY
    • RESET KEY
    • ZERO KEY
    • SHUTTER KEY
    • STATUS KEY
    • ARROW KEYS
    • PROGRAM KEY
    • ALPHANUMERIC KEYBOARD
• BENCH CHECKOUT & INSPECTION
  • INSPECTION
  • INITIAL POWER UP
  • SAMPLE PROGRAM
    • MATERIAL #1 PARAMETERS
    • MATERIAL #2 PARAMETERS
    • PROCESS PARAMETERS
  • SIMULATE OPERATION
  • MANUAL OPERATION
  • INSTALLING OPTION BOARDS
    • SOURCE-SENSOR BOARD
    • DISCRETE I/O BOARD
    • IEEE-488 OPTION BOARD
  • DIGITAL TO ANALOG CONVERTER (DAC) CHECKOUT
• PROGRAMMING AND CONTROLLER SETUP
  • GENERAL
    • NAVIGATING THE MENU STRUCTURE
    • ENTERING ALPHA CHARACTERS
    • ENTERING TIME PARAMETERS
    • COPYING AND DELETING
    • PASSWORD PROTECTION
      • VIEW/RUN PROCESS PASSWORD
      • EDIT PROCESS PASSWORD
      • EDIT MATERIAL PASSWORD
    • ADJUSTING PARAMETER/STATUS DISPLAY CONTRAST
  • GETTING STARTED
    • UTILITY SETUP
    • DAC SETUP
    • SOURCE SETUP
    • SENSOR SETUP
      • EXAMPLE USING MAXTEK’S RSH-600 SIX CRYSTAL SENSOR HEAD
    • INPUT, OUTPUT AND ACTION SETUP
    • DISPLAY SETUP
    • MATERIAL SETUP
      • POWER RAMPS
      • AUTOMATIC CRYSTAL SWITCHING
      • RATE ESTABLISH
      • RATE RAMPS
      • RATE SAMPLE MODE
      • RATE DEVIATION ALARM
    • PROCESS SETUP
    • STARTING A NEW PROCESS
    • RESUMING A PROCESS FROM ABORT OR HALT
  • DETAILED PROGRAMMING
    • VIEW/EDIT PROCESS
      • DEFINE A PROCESS
    • VIEW/EDIT MATERIAL
      • DEFINE A MATERIAL
    • SYSTEM SETUP
      • EDIT DISPLAY SETUP
      • PROGRAM INPUTS
      • PROGRAM OUTPUTS
        • ENTERING A CONDITION STRING
        • CONDITION TYPES
      • PROGRAM ACTIONS
      • EDIT SENSOR SETUP
      • EDIT SOURCE SETUP
      • EDIT DAC SETUP
      • EDIT UTILITY SETUP
• OPERATING THE MDC-360
  • SIGN-ON SCREEN
  • STARTING A NEW PROCESS
  • STARTING A NEW LAYER
  • RESUMING AN ABORTED OR HALTED PROCESS
  • STATUS DISPLAYS
  • VIEWING RESULTS
  • MODES
    • PROCESS READY
    • ABORT
    • HALT (SOFT ABORT)
    • IN PROCESS
    • NOT SAMPLING
    • PROCESS COMPLETE
    • MANUAL
    • SIMULATE
  • STATES
  • TROUBLE, ERROR AND WARNING MESSAGES
    • DESCRIPTION
      • MIN RATE&MAX POWER
      • MAX RATE&MIN POWER
      • SYSTEM SETUP MEMORY CORRUPTED
      • PROCESS MEMORY CORRUPTED
      • MATERIAL MEMORY CORRUPTED
      • RATE EST. ERROR
      • CRYSTAL FAILURE
      • SOURCE FAULT
      • SENSOR FAULT
      • TIME POWER
      • RATE DEV. ALARM
      • ALARM ACTION
      • CRYSTAL MARGINAL
      • RATE DEV. ALERT
      • MAX POWER ALERT
      • MIN POWER ALERT
      • ALERT ACTION
      • XTAL FAIL SWITCH
      • XTAL MRGN SWITCH
      • RATE DEV. ATTEN
      • MAXIMUM POWER
      • MINIMUM POWER
      • CHANGE POCKET...
      • CHANGE CRYSTAL...
      • ATTENTION ACTION
• TUNING THE MDC-360 CONTROL LOOP
  • Control Loop Basics
  • CONTROL LOOPS APPLIED TO VACUUM DEPOSITION
  • ESTABLISHING MDC-360 CONTROL LOOP PARAMETERS
• INPUT/OUTPUT CHARACTERISTICS
  • SOURCE CONTROL VOLTAGE OUTPUT
  • SENSOR INPUT
  • DISCRETE OUTPUTS
  • DISCRETE INPUTS
  • DIGITAL-TO-ANALOG CONVERTER OUTPUTS
  • DIGITAL-TO-ANALOG CONVERTER CONTROL INPUTS
• CONTROLLER INSTALLATION
  • MOUNTING
  • PROPER GROUNDING
  • EXTERNAL CONNECTIONS
    • POWER
    • VOLTAGE SELECTION
    • GROUND LUG
    • REMOTE POWER HANDSET
    • SOURCE-SENSOR
    • RS-232 COMMUNICATION
    • DISCRETE INPUT/OUTPUT
    • DIGITAL-TO-ANALOG CONVERTER (DAC)
• SYSTEM INSTALLATION
  • SENSOR HEAD DESCRIPTION
  • SENSOR HEAD INSTALLATION
  • SENSOR OSCILLATOR
    • INSTALLATION
  • INSTRUMENTATION FEEDTHROUGH
  • SENSOR CRYSTAL REPLACEMENT
  • TYPICAL SYSTEM INSTALLATION
• THEORY OF OPERATION
  • BASIC MEASUREMENT
  • FILM THICKNESS CALCULATION
  • CRYSTAL HEALTH CALCULATION
  • RATE CALCULATION
  • RATE CONTROL
  • EMPIRICAL CALIBRATION
    • FILM DENSITY
    • TOOLING FACTOR
    • ACOUSTIC IMPEDANCE
• COMPUTER INTERFACE
  • GENERAL
  • RS-232 SERIAL INTERFACE
  • RS-485 SERIAL INTERFACE
  • IEEE-488 PARALLEL INTERFACE
  • PROTOCOL
  • DATA TYPES
  • MESSAGE RECEIVED STATUS
  • INSTRUCTION SUMMARY
  • INSTRUCTION DESCRIPTIONS
• REPAIR AND MAINTENANCE
  • HANDLING PRECAUTIONS
  • MAINTENANCE PHILOSOPHY
  • TROUBLE SHOOTING AIDS
  • RETURNING THE MDC-360 TO THE FACTORY
• APPENDIX A
• APPENDIX B – PARAMETER TEMPLATES
  • MATERIAL
  • PROCESS
  • DISPLAY SETUP
  • INPUTS
  • OUTPUTS
  • ACTIONS
  • SENSOR SETUP
  • SOURCE SETUP
  • DAC SETUP
  • UTILITY SETUP