Basic operation, Mass flow measurement and control, Changing fluidset, range or operating conditions – Bronkhorst EL-FLOW Prestige User Manual

Page 13: 3basic operation, 1 mass flow measurement and control, 1 changing fluidset, range or operating conditions

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Bronkhorst High-Tech B.V.

EL-FLOW Prestige

13

9.17.084

3

Basic operation

3.1

Mass flow measurement and control

After correct installation of the EL-FLOW Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety

precautions have been taken into account (see chapter 2) the instrument can immediately be used for measuring/ controlling the

required flow rate in the system by means of the selected communication interface(s).

Here are some general guidelines for mass flow measurement/control:

EL-FLOW Prestige MFMs/MFCs are most accurate at the specified inlet/outlet pressure, temperature and process gas

conditions, however the instrument will function properly in a wide range of varying conditions. It is strongly advised to

use the FlowTune

TM

software available with the instrument to set the correct process conditions if the actual process

conditions differ from the conditions for which the instrument is set (see section 3.1.1).

Although EL-FLOW Prestige MFMs/MFCs have excellent temperature stability, the best accuracy is achieved when

temperature gradients across the instruments are avoided; so make sure that the gas temperature equals the ambient

temperature and mount the instruments on a rigid (heat conducting) surface.

EL-FLOW Prestige MFCs handle pressure shocks in the system well, but are not insensitive to pressure fluctuations. For

optimum control stability, provide a stable (pressure controlled) inlet pressure with sufficient buffer volume between

the pressure regulator and the MFC and avoid installing multiple MFCs or other control valves in close proximity to

another with small volume piping in between.

Mass Flow control

When an MFC (either with normally closed (n.c.) or normally

opened (n.o.) valve) is hooked-up, the control valve closes

when no setpoint is given. When the MFC receives a setpoint from

the active setpoint source, the internal PID controller will

immediately open the control valve until the required flow rate is

achieved and it will maintain that flow rate until another setpoint

is given.

3.1.1

Changing fluidset, range or operating conditions

When the EL-FLOW Prestige instrument is used for other processes/conditions than indicated on the instrument label, use the

FlowTune

TM

software for setting the instrument for the required conditions. With FlowTune the following settings can be changed:

Store up to eight different fluid sets
Select one of 25 pre-installed gases per fluidset or compose any

mixture consisting of these gases
Insert fluid properties for any other gas/mixture per fluidset
Change inlet- and/or outlet pressure according to actual process

conditions
Re-range the full scale (FS) flow rate within the instrument's

accepted flow range
Change the control speed per fluidset for faster or slower

(smoother) flow control

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