INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 94)

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IQM-233 Operating Manual
5 Set Filter Readings Parameter
In the Setup window (Setup >> General):
 Set the Measurement Period to the desired value.
 Test the setup following step 4 above.
 If rate noise is present with Filter Readings setting of 1, slowly increase the
value from 1 to a higher value until the rate display noise is minimized.
NOTE: If Filter Readings is set too high, the display will lag the true system
response and may hide significant problems.
6 Determine Max Power
 Verify Source Control is set to Manual and click Start.
 Slowly increase power until the desired rate is achieved.
 Record the Power reading at the desired rate as PWR
DR
.
 Set Max Power (%) to a value 20% higher than PWR
DR
.
 If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 7.
7 Determine Open Loop Response Time (refer to Figure 6-1 )
 Calculate 1/3 of the desired rate (RATE
1/3
), and 2/3 of the desired rate
(RATE
2/3
).
 Slowly adjust the power until the rate matches RATE
1/3
and is steady.
 Quickly adjust Power (%) to PWR
DR
and measure the time for the rate to
equal RATE
2/3
.
 Twice the measured time is the step response time, TIME
SR
.
 If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 8.
NOTE: TIME
SR
is typically 0.2 to 1 second for e-beam evaporation and at least
5 seconds for thermal evaporation.
NOTE: It is recommended to repeat this step several times to get an average
response time.