INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
Freq (Hz) displays Fail.
Failed or defective crystal, or
no crystal in sensor.
Install a new crystal.
Two crystals were installed or
crystal is upside down.
Remove extra crystal.
Reverse crystal orientation.
Inspect crystal for scratches;
if scratched, replace with
new crystal.
Built-up material at crystal
holder aperture is touching
the crystal.
Clean or replace the crystal
holder.
Crystal frequency is not
within the frequency range
settings in software.
Use a 5 MHz or 6MHz
crystal.
Check the crystal frequency
range settings in software.
Excessive cable length
between oscillator and
crystal.
Use no longer than a 78.1 cm
(30.75 in.) in-vacuum cable.
Use only the 15.2 cm (6 in.)
cable between oscillator and
feedthrough.
Table 5-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM
CAUSE
REMEDY