INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual

Page 77

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5 - 3

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58

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IQM-233 Operating Manual

Freq (Hz) displays Fail.

Failed or defective crystal, or
no crystal in sensor.

Install a new crystal.

Two crystals were installed or
crystal is upside down.

Remove extra crystal.

Reverse crystal orientation.

Inspect crystal for scratches;
if scratched, replace with
new crystal.

Built-up material at crystal
holder aperture is touching
the crystal.

Clean or replace the crystal
holder.

Crystal frequency is not
within the frequency range
settings in software.

Use a 5 MHz or 6MHz
crystal.

Check the crystal frequency
range settings in software.

Excessive cable length
between oscillator and
crystal.

Use no longer than a 78.1 cm
(30.75 in.) in-vacuum cable.

Use only the 15.2 cm (6 in.)
cable between oscillator and
feedthrough.

Table 5-1 Symptom/Cause/Remedy Chart (continued)

SYMPTOM

CAUSE

REMEDY

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