4 parts requirements – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
2.1.1.4 Parts Requirements
IQM-233 card(s).
One to three crystal sensor(s) for each IQM-233 card. See
Up to one user-provided source output cable for each IQM-233 card. A source
output cable is not required if the card will be used only as a monitor. See
section 2.1.2.3, Source Output Cable and Connection, on page 2-13
One SMA/BNC adapter cable for each crystal sensor.
One oscillator kit for each crystal sensor. See
IQM-233 Standard software (located on the Thin Film Manuals CD), or the
optional IQS-233 Codeposition software.
CAUTION
For proper performance of the IQM-233 card, the crystal
sensor in-vacuum cable (Front Load and Sputtering
sensors) or electrical conduit tube (Cool Drawer and
Bakeable sensors) should not exceed 78.1 cm (30.75 in.).
Use only the short BNC cable (15.2 cm (6 in.)) included in
the oscillator kit to connect the oscillator to the crystal
sensor.