INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 55)

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PN
07
4-
58
4-
P1
A
IQM-233 Operating Manual
P . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 to 9999
P is the proportional term that sets the gain of the control loop. A value of 0
makes this function unavailable. Enter a high gain for a faster responding (but
potentially unstable) control loop, and a lower gain for a slower responding
control loop. Enter a value of 25, and then gradually increase or decrease the
value to respond as desired to rate step changes. See
section 6.5, Tuning the
Control Loop, on page 6-5 .
I . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 to 999.9
I is the integral term that controls the time constant of the loop. A value of 0
makes this function unavailable. Enter a small I Term, such as 0.5 to 1 second,
to smooth the response and minimize overshoot to rate step changes. See
section 6.5, Tuning the Control Loop, on page 6-5 .
D. . . . . . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9
D is the derivative term that determines how quickly the control loop responds
to changes. A value of 0 makes this function unavailable. Enter 0 or a very
small value to avoid rate oscillations, especially with fast sources, such as
electron beam guns. Slow sources, such as resistively heated sources, may
require a large D value. See
section 6.5, Tuning the Control Loop, on page 6-5 .
NOTE: Click OK to save the Source Setup parameters.
3.3.3.2 Map Sensor
Map Sensor . . . . . . . . . . . . . . . . . . . None, Output 1, Output 2, Output 3
Unavailable (default is None) unless the Control Enabled check box is selected
in the Setup window. Refer to
Figure 3-11 .
Select None if monitoring a deposition, or select an Output if controlling a
deposition by PID closed-loop or manual source control.
Each sensor can be mapped to a different output for codeposition.
Multiple sensors can be mapped to the same output for rate averaging. The Rate
readouts in the Source Information pane display an aggregate rate when multiple
sensors are mapped to an output. Rate readouts in the Sensor Information pane
are not affected by the Map Sensor configuration and display Rate only for the
individual sensors.
If a sensor's rate becomes erratic during deposition, the sensor
can be turned off by changing the Output to None. If any sensor fails, its
measurement is automatically excluded from the aggregate rate.
Click ▼ to view the Map Sensor list. See Figure 3-15 .