5 simulate mode, For d – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
Manual Power (%) . . . . . . . . . . . . . 0 to 100%
Manual must be selected in the Source Control list to use this function.
In the Manual Power (%) cell of the corresponding output field, type or select
a value, and then click another cell or press Enter to accept the value. The
source output voltage and Power (%) will remain at zero until Start is clicked.
Zero
Click Zero in the Source Information pane to zero the thickness readout in the
corresponding output field and zero the thickness readout(s) in the sensor
information pane for any sensor mapped to that output.
Hold, Resume
Hold is available only when Stop is displayed. Click Hold, which changes to
Resume, to freeze all thickness values and set all source output power levels
to zero.
Click Resume, which changes to Hold, to continue the deposition from the
previously frozen thickness value.
3.3.4.5 Simulate Mode
Simulate mode allows a deposition process to be developed and tested without the
need for an IQM-233 or SQM-242 card to be installed or sensors to be connected
to an installed card. Simulated values are provided for the thickness, rate, rate
deviation, frequency, life, and power readouts.
To activate and configure Simulate mode:
1
On the menu bar, click Setup >> General.
2
The Setup window will display. See
3
Select the Enable Simulate check box. This check box is automatically
selected when no cards are installed.
4
In the Card Type box, click ▼ and then select from the list the card type to be
simulated (IQM-233 or SQM-242).
5
Simulation of a deposition process requires the Source Information pane for
source control. Select the Control Enabled check box if the Source
Information pane is not displayed in the IQM-233 Standard window.
6
Click OK to save the parameters.
NOTE: The simulated Rate and Thickness will remain at zero until the Power
(%) readout increases to approximately 50%.
NOTE: The factory-default PID values of P = 5, I = 2.0, and D = 0.00 provide
a stable simulated rate. The simulated rate may become unstable if the
PID values are changed. Refer to
section 3.3.3.1.4, Source, on page
for information on configuring the PID values.