INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual

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IQM-233 Operating Manual

Sif142GetMaterial (double SensorParams (0 to 23, 0 to 2),
double SystemParams (0 to 4)

Read material parameters: Density, Z-Ratio, and Tooling (0 to 23, 0 to 2) and
system parameters: max freq, min freq, init freq, period, norm/sim (0 to 4)

Sif142FullScale (long Output, double FullScaleVolts,
double MaxPwr, double SlewRate)

Sets the source output operating parameters.

Output . . . . . . . . . . . . . . . . . . . . The output of these parameters 0 to 17.

FullScaleVolts. . . . . . . . . . . . . . Maximum scaled voltage for the output when

the output is at 100% power. Values from -10
to +10 are valid.

MaxPwr . . . . . . . . . . . . . . . . . . . Maximum power that the loop is allowed to

output, expressed as 0.0 to 1.0, representing
0% to 100%.

SlewRate . . . . . . . . . . . . . . . . . . Maximum rate of change of the output,

expressed as the percent of Full Scale times
0.01 second.

Sif142Auto (long Output)

Exits manual power control and starts the control loop running on the indicated
output channel.

Output . . . . . . . . . . . . . . . . . . . . 0-17, indicating the output to place in PID

control.

Sif142Loop2 (double Rate, double P, double I, double D,
long Output)

Sets the control loop parameters for an output. The sensors specified in
Sif142MapSensors are averaged to provide the input parameters to the PID
loop.

Rate . . . . . . . . . . . . . . . . . . . . . . Specifies the rate to control, from -999.9 to

999.9 Å/s.

P . . . . . . . . . . . . . . . . . . . . . . . . . Proportional (gain) term of the PID loop, from

0 to 9999. This number has no units.

I . . . . . . . . . . . . . . . . . . . . . . . . . Integral term, from 0 to 999.9, expressed in

seconds.

D. . . . . . . . . . . . . . . . . . . . . . . . . Derivative term, from 0 to 99.9, expressed in

seconds.

Output . . . . . . . . . . . . . . . . . . . . The output (0 to 13) to which the parameters

apply.

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