INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 14)

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IQM-233 Operating Manual
1.1.2 IQM-233 Standard Software Features
 Basic setup and control of one IQM-233 card or one SQM-242 card
(SAM-242 card not supported)
 Single layer process setup
 Single layer monitoring of up to three quartz crystal sensors
(up to four sensors for SQM-242)
 Single layer codeposition of up to three sources
(up to two sources for SQM-242)
 Compatible with all INFICON non-shuttered single sensors:
Front Load, Cool Drawer, Bakeable, and Sputtering
NOTE: Shuttered sensors require a PLC and IQS-233 Codeposition software
for automatic shutter control.
NOTE: Not compatible with CrystalSix, Crystal12, and RSH-600 rotary
sensors.
NOTE: Not compatible with the CrystalTwo switch.
1.1.3 IQS-233 Codeposition Software Features
 Advanced setup and control of up to two IQM-233 cards or two SQM-242 cards
(SAM-242 card not supported)
 Multi-layer process setup
 Codeposition of up to six sources (up to four sources for SQM-242 card)
 Easy PLC integration for event-selectable relay functions and shutter control
 Compatible with all INFICON single and dual sensors:
Front Load, Cool Drawer, Bakeable, Sputtering
NOTE: Shuttered sensors require a PLC for automatic shutter control.
NOTE: Not compatible with CrystalSix, Crystal12, and RSH-600 rotary
sensors.
NOTE: Not compatible with the CrystalTwo switch.