4 source control operating functions, Section 3.3.4.4, source, Section 3.3.4.4 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual

Page 63: Section 3.3.4.4, source control operating

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IQM-233 Operating Manual

Zero

Click Zero in the Sensor Information pane to zero the thickness readout of the
corresponding sensor. If an output is mapped to this sensor, the effect of the
zero function on the corresponding thickness readout in the Source
Information
pane is determined by the sensor mapping (refer to

section

3.3.3.2, Map Sensor, on page 3-15

).

3.3.4.4 Source Control Operating Functions

In addition to the operating functions described by

section 3.3.4.3

, the following

operating functions are available when the Source Information pane is displayed.
See

Figure 3-23

.

Figure 3-23 Operating functions - source control

Source Control . . . . . . . . . . . . . . . . Auto, Manual, Off

Click ▼ to view the Source Control list. See

Figure 3-24

.

Figure 3-24 Source Control list

Select Auto for PID closed-loop control of the source power supply.

Select Manual for manual control of the source power supply.

Select Off to make the source output unavailable. Sensors mapped to that
output will monitor the deposition.

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