4 source control operating functions, Section 3.3.4.4, source, Section 3.3.4.4 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
Page 63: Section 3.3.4.4, source control operating
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IQM-233 Operating Manual
Zero
Click Zero in the Sensor Information pane to zero the thickness readout of the
corresponding sensor. If an output is mapped to this sensor, the effect of the
zero function on the corresponding thickness readout in the Source
Information pane is determined by the sensor mapping (refer to
3.3.3.2, Map Sensor, on page 3-15
).
3.3.4.4 Source Control Operating Functions
In addition to the operating functions described by
, the following
operating functions are available when the Source Information pane is displayed.
See
.
Figure 3-23 Operating functions - source control
Source Control . . . . . . . . . . . . . . . . Auto, Manual, Off
Click ▼ to view the Source Control list. See
.
Figure 3-24 Source Control list
Select Auto for PID closed-loop control of the source power supply.
Select Manual for manual control of the source power supply.
Select Off to make the source output unavailable. Sensors mapped to that
output will monitor the deposition.