3 source control, Section 3.3.3.3, Figure 3-15 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
Figure 3-15 Map Sensor list
Select None if no output will be mapped to the corresponding sensor. This
sensor will only monitor the deposition.
Select Output 1, Output 2, or Output 3 to map the output to the corresponding
sensor.
NOTE: If the Control Enabled check box is cleared in the Setup window after
a Map Sensor output is selected, the Map Sensor buttons become
unavailable and display the selected configuration.
3.3.3.3 Source Control
Source Control . . . . . . . . . . . . . . . . Auto, Manual, Off
Click ▼ to view the Source Control list. See
Figure 3-16 Source Control list
Select Auto for PID closed-loop control of the source power supply.
Select Manual for manual control of the source power supply.
Select Off to make the source output unavailable. Sensors mapped to that
output will monitor the deposition.