INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 119)

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SQC-310 Operating Manual
C.2.2 Binary I/O
To use binary wiring between the CI-100 and SQC 310 for a four pocket crucible:
SQC-310 CI-100 Binary I/O
Pin 1,3,5,14,24 ---------------- Pin 1, 2 Common
Pin 16 ------------<-------------- Pin 3 OutX Pocket Ready
Pin 15 ------------>-------------- Pin 4 OutX Pocket 1
Pin 2 -------------->-------------- Pin 6 OutX Pocket 2
Pin 4 -------------->-------------- Pin 8 OutX Pocket 3
Pin 6 -------------->-------------- Pin 10 OutX Pocket 4
On the CI-100 rear panel, set Select Switch #5 Down.
On the SQC-310 System Menu, Sensors & Sources set up the source with:
 Number of Positions: 4
 Control Type: Individual
 Feedback Type: In Position
 Indexer Delay: 5 seconds