INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 43)

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SQC-310 Operating Manual
Chapter 3
Menus
3.1 Introduction
Three menus on the Main Screen control SQC-310 operation. The SoftKeys
associated with each of these menus leads to sub menus. This chapter describes
the function of each setting in each menu. It is arranged by Main Screen menus,
then by major sub menus.
The Main Screen for the SQC-310 is shown in Figure 3-1 .
Figure 3-1 Main Screen
At the top of the screen you will find information about the current process, layer,
and run status. Immediately below is the current deposition phase and error
conditions.
The central graph displays Rate, Rate Deviation, or Output Power. If multiple
materials are being deposited, the graph shows each material in a different color.
Below the graph is a display of deposition readings. This display always shows the
current rate and thickness readings. The remaining columns can be set to display
either Power and Deviation readings or Rate and Thickness setpoints. For a
standard SQC-310 there will be two lines, corresponding to the two control outputs.
With an expansion card installed there will be four lines, as shown.
The Main Screen SoftKey legends will change based on the Menu selection and
the current process status. The three different menus for the main screen are
accessed by pressing the Next Menu SoftKey.
Zero
Next
Layer
Next
Menu
Quick
Edit
Auto /
Manual
Process 1 : Layer 1 of 1 Run # :0
Start
Layer
0.0
50.0
100.0
0.0 6.2 12.5 18.8 25.0
Power ( % vs. Time)
Out#
1
2
3
4
Rate(A/S)
0.00
0.00
0.00
0.00
Dev( %)
00.0
00.0
00.0
00.0
Thick(kA)
0.000
0.000
0.000
0.000
Pow( %)
0.0
0.0
0.0
0.0
Stopped 0:00:00