INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 91)

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SQC-310 Operating Manual
Parameters: 1 Turn Relay: On (locks relay for remote use only)
2 Turn Relay: Off (locks relay for remote use only)
3 Unlock Relay (Releases the Relay back to the Instrument)
Format: . . . . . . . . GE[Relay#] [Parameter1]
Example: . . . . . . GE1 1
Returns: A
5.3.9 Get/Set Sensor, Source, Relay Parameters
Command: . . . . . H (obsolete)
Description: . . . . Gets/Sets the logical function of each of the 16 relays.
Parameters: 1 Source 1 Shutter 21 Max. Power
2 Source 2 Shutter 22 Stopped
3 Source 3 Shutter 23 Time Setpoint
4 Source 4 Shutter 24 Thick Limit
5-8 Sensor 1-4 Shutter 25 Final Thickness
9-12 Sensor 1-4 Fail 26 Dual Xtal 1/2 Shutter
13 All Crystals Good 27 Dual Xtal 3/4 Shutter
14 All Crystals Bad 28-35 Out1 Pocket 1-8
15 Process Hold 36-43 Out1 Pocket 1-8
16 Deposit Phase 44-51 Out1 Pocket 1-8
17 PreCond Phase 52-59 Out1 Pocket 1-8
18 SoakHold Phase
19 Process Active
20 Manual Mode
Example: . . . . . . To Get Relay 1 and Relay 2 functions, send: H? 1 2
The return for Source 1 Shutter and Sensor 1 Shutter would be:
1,1 2,5
To Set the same parameters you would send: H1 1,1 2,5
Command: . . . . . HA
Description: . . . . Gets/Sets the parameters of each of the 2 or 4 sensors.
Parameters: 1 Crystal Tooling 6 Drive Type
2 Number of Positions 7 Feedback Type
3 Shutter 8 Indexer Delay (sec.)
4 Shutter Delay (ms) 9 Current Crystal Position
5 Control Type