INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 120)

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SQC-310 Operating Manual
C.3 Interfacing to a MDC E-Beam Sweep Controller
C.3.1 BCD I/O
Wiring between the SQC-310 and an MDC E-Beam
Sweep Controller to Select Pattern 1 to 8
SQC-310 Sweeper
Pin 14------------->-------------- Pin 8 OutX Pocket Bit1
Pin 1 -------------->-------------- Pin 7 OutX Pocket Bit2
Pin 3 -------------->-------------- Pin 6 OutX Pocket Bit3
Pin 5 --------------<-------------- Pin 12 Process Stopped
Pin 7 --------------<-------------- Pin 13 SourceX Enable
Pin 15,2,4,6,8------------------- Pin 16 Common
On the SQC-310 System Menu, Sensors & Sources set up the source with:
 Number of Positions: 8
 Control Type: BCD
 Feedback Type: None
 Indexer Delay: 1 seconds
 Logic Statement: IF SourceX Enable AND NOT Crystal Verify AND NOT
Preconditioning AND NOT SoakHold THEN Relay 4
 Logic Statement: IF NOT Stopped AND NOT Stop Layer AND NOT Manual
Start Layer THEN Relay 5