INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 18)

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SQC-310 Operating Manual
1.6 Menus
At power up the SQC-310 briefly displays the model number (SQC-310 or
SQC-310C) and firmware version information, then the Main screen. See
Figure
1-5 .
NOTE: If you are prompted for a password, use the switches along the left of the
screen to enter the password. The top switch is “1”, the bottom switch is
“6.” The Control Knob switch is "7." See
section 5.3.3, Get/Set System
Parameters, on page 5-5 for password setup information.
Figure 1-5 Main Screen
The first line of the Main screen shows the name of the currently selected process.
After the process name are the layer that will run when the Start SoftKey is pushed,
and the total number of layers in the process. Further to the right is the number of
times this process has been run.
The second line of the Main screen is a status line. It displays the current phase
of the deposition cycle, and other status or error messages. When the process is
running, the right side of this line shows the process elapsed time.
Three graphs are possible: rate, rate deviation, and output power. The graphs
scale the vertical axis and scroll the horizontal axis based on the data displayed.
Below the graph are two lines that show deposition readings (four lines if the option
card is installed). This section shows current rate, rate deviation, thickness, and
output power as shown above. Alternatively it can show measured rate and
thickness versus rate and thickness setpoints.
The six SoftKey legends along the left side of the screen will change, depending
on the status of the process and the functions you select. Press Next Menu to
display alternate main screen menus. See
Figure 1-6 .
Zero
Next
Layer
Next
Menu
Quick
Edit
Auto /
Manual
Process 1 : Layer 1 of 1 Run # :0
Start
0.0
50.0
100.0
0.0 6.2 12.5 18.8 25.0
Power ( % vs. Time)
Out#
1
2
3
4
Rate(A/S)
0.00
0.00
0.00
0.00
Dev( %)
00.0
00.0
00.0
00.0
Thick(kA)
0.000
0.000
0.000
0.000
Pow( %)
0.0
0.0
0.0
0.0
Stopped 0:00:00
Layer