INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 33)

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SQC-310 Operating Manual
If your sensor has a shutter, select Dual or Yes. Dual sets the sensor inputs for a
dual sensor (one that uses two sensor inputs). Yes is used for either a shuttered
single or multi-crystal sensor. Either Dual or Yes will automatically assign the first
available relay as the shutter relay. The relay opens immediately when a layer
enters the Deposit, Shutter Delay, or Control Delay states.
For multi-crystal sensors set Number of Positions to the number of crystals.
Several other parameters are required for multi-crystal heads. Set the Control type
and Feedback for the type of Digital I/O used by your sensor. The SQC-310 will
automatically create relays and inputs to control the sensor. Detailed explanations
of multi-crystal setup can be found in
section 3.11.3.1, Sensor Setup, on page
3-31 .
Source setup is nearly identical to the Sensor Setup described above.
Set the Voltage Scale to the control voltage that corresponds to 100% output on
your source supply. The SQC-310 uses 0 volts as 0% output, and the programmed
value as 100% output. Scale values from –10 volts to 10 volts are possible.
Source shutters will open after pre-conditioning, when deposition begins. In your
system, this may actually be the substrate shutter.
For a multi-position source, select the number of positions. Control and feedback
settings similar to those used for multi-position sensors become available. See
section 3.11.3, Sensors and Sources Menu, on page 3-31 for detailed information
on these settings.
2.7 Running a Process
Once a Process is defined with the desired Layers, and the sensors and source
supply are properly connected, the deposition process is ready to run. This section
describes the steps to select, start, and stop a process.
NOTE: Depending on the Main Menu screen displayed, the last key will be shown
as either Start or Start Layer. For simplicity, this section will use Start to
refer to either.
There are three Main Menu screens while the process is stopped (two when it is
running). Pressing the Next Menu SoftKey accesses the three screens. Next Menu
is the first SoftKey in each of the three menus. Likewise, Start/Stop is the last
SoftKey on each Main Menu. Main Menu 1 displays the SoftKeys used to control
the process.