INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 58)

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SQC-310 Operating Manual
3.10.1 Film Conditioning Menu
The Film Conditioning Menu contains the power settings used before and after
deposition. Definitions of each parameter appears later in this section.
Figure 3-12 Film Conditioning Menu
Ramp 1: Ramp power sets the power level (% of full scale) desired at the end of
the ramp phase. Ramp time sets the time to ramp linearly from the initial power to
the Ramp power. Soak time sets the time the output remains at the ramp power
level.
Ramp 2: Ramp 2 functions are the same as Ramp 1. Typically, Ramp 2 power is
set near the power level required to achieve the desired initial deposition rate.
Feed: The feed phase holds output power at the level and time required to wire
feed new material.
Idle: Idle power ramps output power back to zero, or holds the material at a state
that is ready for deposition (usually the same as Ramp 2 power).