INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 31)

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SQC-310 Operating Manual
2.5 Defining a Layer
To edit a Process Layer, press Process Menu. Select the desired process,
then press Edit. Finally, select the desired layer and press Edit....
Figure 2-7
Initial Rate and Final Thickness are the main process setpoints for the film used in
this layer. Time Setpoint and Thickness Limit are secondary values that can
activate a relay when they are reached.
Start Mode controls operation in multi layer processes. In Auto Start the layer starts
immediately on completion of the previous layer. Manual Start waits for a user
signal via the front panel, digital input, or communications port to start the layer.
Don’t confuse this Manual Start mode with the Manual Power SoftKey function.
The SQC-310 can use multiple sensors to measure a film’s deposition rate and
thickness. If multiple sensors are selected, an average of the sensors is used. Set
each sensor that will be used to measure this film to ON.
The Source entry assigns the layer to a specific SQC-310 rear panel source output.
The layer (and associated film parameters) will be applied to the selected output.
Assign the Max, Power, Min. Power, Power Alarm Delay and Slew Rate
appropriate for the material and your power supply. For now, set Max Power & Slew
rate to 100%. Set them to lower values if you find that small power changes cause
excessively large changes in deposition rate. Leave Rate Deviation alarms at 0%
for now.
Rate Ramps allow the PID controlled deposition rate to change over time, under
PID control. Each rate ramp has a starting thickness, an elapsed time to ramp to
the new rate, and a new rate setpoint. Each process layer can have up to two rate
ramps.