INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 26)

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SQC-310 Operating Manual
2.3 Defining a Film
A film is a material to be deposited, plus all of its associated setup parameters.
Keep in mind that a film can be used in multiple layers, or even multiple processes.
Editing a film’s parameters will cause changes to every location where the film is
used.
To define a film, press Next Menu until Film Menu is shown (Menu 3). Press Film
Menu. A list of 50 films (or <Empty>) will be displayed. To define a new film, scroll
to <Empty> and press Create. To change the name of a film, scroll to the film and
press Edit Name. Scroll through the character set and Insert each character for
the film name. Press Save to return to the Film Menu. Press Edit to display the
parameters for this film.
Figure 2-2 Film Edit Menu
P Term is the proportional gain, which is the % process rate change divided by the
% input power change. The I Term (integral) sums the rate deviations over time to
more accurately achieve the rate setpoint. The D Term (derivative) speeds
response to sudden changes in rate. Volumes have been written on determining
the proper PID settings. See
section 2.8 on Loop Tuning later in this chapter for a
common PID loop tuning procedure. Start with P=25, I=.5, D=0.
Film Tooling adjusts for differences in actual versus measured thickness for this film
(material). This parameter is seldom used, but can adjust for material specific
dispersion patterns. See Xtal Tooling in the System menu for the more commonly
used tooling correction.
Pocket selects the source pocket used for this film. This parameter requires that
the System Menu, Source Setup be configured for an indexer (
Sensors and
Sources Menu, see section 3.11.3 ).
The next chapter will cover Crystal Quality and Stability. For initial operation leave
Quality and Stability disabled.