INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 19)

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SQC-310 Operating Manual
Figure 1-6 Alternate Main Screen Menus
Because Main Menu 3 provides access to functions that can completely redefine a
process, it is available only when the process is stopped.
Spend some time now moving between the three menus. Pay particular attention
to the effects that the Main Menu 2 selections have on the display. We will cover
the setup parameters of Main Menu 3 in the Building a Process section.
1.7 Thin Film Deposition Overview
The SQC-310 stores the recipes, and provides the operating functions, required to
control thin film deposition processes. A typical thin film deposition cycle is shown
in
Figure 1-7 .
Figure 1-7 Typical Thin Film Deposition Cycle
Main Menu 1 Main Menu 2 Main Menu 3
Next
Layer
Start
Zero
Auto /
Manual
Next
Menu
Quick
Edit
Start
Next
Layer
Sensor
Info
Next
Display
Next
Graph
Next
Menu
Start
System
Menu
Film
Menu
Process
Menu
Next
Menu
Zero the thickness
reading on all
channels.
Switch between PID
and Manual power
control.
Access the most
commonly edited
settings.
Select the next layer
in the process.
Start or Stop the
selected layer.
Switch graph between
rate, deviation, and
power.
Switch the readout
below the graph.
Display detailed
sensor information.
Select the next layer
in the process.
Start or Abort the
process.
Start the selected
layer.
Modify instrument
related settings.
Create or edit films to
be used as layers.
Create or edit process
layers.
Third menu available only
when process is stopped.
Main Menu 1 Main Menu 2 Main Menu 3
Layer