9 film menus – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
NOTE: Each CoDep layer must be assigned to a different output and sensor. A
warning message is displayed if there is a conflict. Highlight each CoDep
layer, press Edit, and assign unique sensors and outputs.
3.9 Film Menus
Each film has certain characteristics that determine how it should be deposited.
The Film Menus allow you to set parameters that regulate the deposition of each
film. These parameters apply any time this film is used (in any process).
Figure 3-10 Film Select Menu
Press Edit to view the setup parameters for the selected film.
Table 3-8 Film Select Menu SoftKeys
Main Screen
Returns to the Main Menu.
Edit
Displays the Film Edit Menu for the highlighted film.
Edit Name
Displays the character entry screen to edit the selected film name.
Delete
Deletes the highlighted film. (Note: Films cannot be deleted if they
are used in any process.)
Copy/Paste
Copies the highlighted film. Scroll to a film labeled as "<Empty>"
and use Paste to paste the copied film.
Create
Available only when an undefined film (labeled as "<Empty>") is
highlighted. This button defines the empty slot as a film and assigns
it a film number, allowing it to be used in a process.