9 film menus – INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

NOTE: Each CoDep layer must be assigned to a different output and sensor. A

warning message is displayed if there is a conflict. Highlight each CoDep
layer, press Edit, and assign unique sensors and outputs.

3.9 Film Menus

Each film has certain characteristics that determine how it should be deposited.
The Film Menus allow you to set parameters that regulate the deposition of each
film. These parameters apply any time this film is used (in any process).

Figure 3-10 Film Select Menu

Press Edit to view the setup parameters for the selected film.

Table 3-8 Film Select Menu SoftKeys

Main Screen

Returns to the Main Menu.

Edit

Displays the Film Edit Menu for the highlighted film.

Edit Name

Displays the character entry screen to edit the selected film name.

Delete

Deletes the highlighted film. (Note: Films cannot be deleted if they
are used in any process.)

Copy/Paste

Copies the highlighted film. Scroll to a film labeled as "<Empty>"
and use Paste to paste the copied film.

Create

Available only when an undefined film (labeled as "<Empty>") is
highlighted. This button defines the empty slot as a film and assigns
it a film number, allowing it to be used in a process.

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