INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 32)

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SQC-310 Operating Manual
2.6 Sensor and Source Setup
The SQC-310 must be configured to match the type of sensor installed in your
system. We will set up a single sensor without a shutter.
Chapter 3 discusses the
other Sensor configuration options.
Select System Menu, Sensors & Sources, scroll to Sensor 1 and press Select to
Display the Sensor 1 menu. See
Figure 2-8 .
Figure 2-8 Sensor 1 Edit
Crystal Tooling adjusts for the difference in measured deposition rate between the
sensor and the substrate being coated.
Figure 2-9 Tooling Over/Under
In the left illustration in Figure 2-9 , the sensor will measure less rate or thickness
than is actually deposited on the substrate because of its positioning. In the right
illustration, the sensor will measure high. Tooling is the ratio of the actual substrate
deposition rate or thickness, to that measured by the sensor.
A simple rule to remember is: If the rate/thickness reading is low, then increase the
tooling value. If the rate/thickness reading is high, then lower the tooling value.
Crystal Tooling
Number of Positions
2. Sensor 2
1. Source 1
2. Source 2 Indexer
Single Source
Single Crystal
1
100%
To
Main
Prev
Menu
Done
Sensors & Sources Menu
Name Value
1. Sensor 1
Shutter No
Edit
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%