INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 37)

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SQC-310 Operating Manual
Figure 2-14 Layer Stopped
Start repeats the stopped layer, beginning with preconditioning. Next Layer allows
you to select another layer to start.
NOTE: Pressing the Reset SoftKey on Main Menu 2 at any time completely aborts
the process.
Spend some time in Simulate mode verifying that the process sequences through
each phase of each layer as expected. If not, use the Quick Edit, Process, and Film
menus to make corrections.
Because the process is being “simulated,” some parameters will not be correct for
your process (particularly PID). However, you can become familiar with the effect
of each parameter in this simulated process. Also practice using the Next Menu
options, especially Auto/Manual modes.
Once you have verified the process in Simulate Mode, you may return to the
System menu and turn Simulate OFF to start testing your process. Use the next
section to finalize the loop PID settings.
2.8 Loop Tuning
This section will help you adjust your SQC-310 to achieve a stable deposition
process. Keep in mind that there is no “best” way to determine tuning parameters,
and no one set of settings that are best.
The first factor to consider is the type of deposition source. Thermal sources are
slow responding and typically free of noise transients. To avoid overshooting and
constantly seeking setpoint, they require PID parameters that anticipate their long
dead time and slow response to changes. Ebeam sources, on the other hand, are
fast responding and often noisy. They are also subject to arcing, which can create
large electrical noise spikes.