4 system connections – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
1.4 System Connections
Figure 1-4 System Connections
Sensor
In-Vac
Cable
Feedthrough
6 in. BNC Cable
Oscillator
Source
Shutter
BNC
Cables
Evaporation Supply
Output
Control Input
Ground Wire
Table 1-3 System Components
Sensor
Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
In-Vac Cable
A coaxial cable that connects the sensor to the feedthrough.
Feedthrough
Provides isolation between vacuum and atmosphere for electrical
and cooling lines.
6” BNC Cable
Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.
Oscillator
Contains the electronics to operate the quartz crystal. Total cable
length to the crystal should be under 40 in.
Sensor Input
BNC Cable
Connects the oscillator to the SQC-310 sensor input. Lengths up
to 100 ft. are acceptable.
Control Output
BNC Cable
Connects the SQC-310 output to the evaporation source’s control
voltage input. Keep the length under 10 ft..
Ground Wire
A wire, typically braided, that connects the vacuum system to the
SQC-310 ground terminal. Important for noise rejection.