INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 25)

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SQC-310 Operating Manual
Chapter 2
Operation
2.1 Introduction
This chapter describes common tasks associated with operating the SQC-310. It
assumes that you understand basic operation of the menus and parameter setup
as described in
Chapter 1, Quick Start . Detailed definitions of each parameter can
be found under the appropriate menu description in Chapter 3, Menus .
2.2 Definitions
Several terms will be used repeatedly throughout this manual. It is important that
you understand each of these terms.
Material: A physical material to be deposited. A database of 100 materials is stored
in the SQC-310. Three parameters completely define a material: Name, Density,
and Z-Ratio (also called Z-Factor). A table of common materials, their densities,
and Z-Ratios is listed in
Appendix A .
Film: A film describes in detail how a material will be deposited. It includes the
material definition and all of the preconditioning, deposition, and post conditioning
variables necessary to accurately deposit the material. Because the film definition
does not include rate and thickness information, a single film can be used in several
different layers and processes. The SQC-310 stores up to 50 films.
Layer: Layers are the basic building blocks of processes. A layer consists of a film
and the thickness and rate setpoints for that stage of the process. Layers also
define which outputs and sensors will be used at that point in the process.
Co-deposition of multiple films occurs when more than one output is active during
a layer.
Process: A process is a sequence of layers to be deposited. The SQC-310 can
store up to 100 processes, consisting of a total of 1000 layers.
Phase: A step in the deposition cycle. Preconditioning phases include Ramp 1,
Soak 1, Ramp 2, and Soak 2. Deposit phases include indexer rotate, shutter delay,
deposition, and deposition rate ramps. Post-conditioning phases include Feed
Ramp, Feed, and Idle Power.
Figure 2-1 Phase