INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 71)

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SQC-310 Operating Manual
Thickness Setpoint
Final Thickness
Time Setpoint
Soak Hold
Rate Dev Alarm
Max Power Alert
Min Power Alert
Crystal Index: Allows you to select a specific crystal on a multi-crystal sensor as
a condition. Choose sensor 1 - 4* and crystal 1 - 16.
Pocket Index: Allows you to select a specific pocket on a multi-pocket source as
a condition. Choose source 1 - 4* and pocket 1 - 16.
Processes: The process condition is evaluated true whenever the selected
process is the current process. Choose process 1 - 100.
Layers: The layer condition is evaluated true whenever the current layer number
equals the specified layer number. Choose layer 1 - 100.
Films: The film condition is evaluated true whenever the current film number
equals the specified film number. Choose film 1 - 50.
NOTE: References to sensor 1 - 4, source 1 - 4, relay 1 - 16, or input 1 - 16 assume
the SQC-310 is equipped with the 4-channel option card. Units not
equipped with the option card will have sensor 1 - 2, source 1 - 2,
relay 1 - 8, and input 1 - 8.
3.11.2.3 Logic Statement Actions ("THEN")
General Actions: A selection of actions that do not fit into another category.
Available actions include:
No Action
Manual
Hold in State
Step From State
Interlock
Sensor & Sources: Actions related to moving multi-crystal sensors and
multi-pocket sources. Available actions include:
Switch Crystal (choose sensor 1 - 4*)
Move Snsr to Next Position (choose sensor 1 - 4*)
Move Src to Next Pocket (choose source 1 - 4*)