INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 83)

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SQC-310 Operating Manual
5.3 SQC-310 Commands
5.3.1 Get Model
Command: . . . . . @
Description: . . . . Returns the model number and software version number.
Parameters: . . . . None
Example: . . . . . . The @ command returns “SQC-310 Ver 6.01”
5.3.2 Get/Set Film Parameters
Command: . . . . . A
Description: There are four film commands. A1 sets/gets the film
name. A2 sets/gets the main film edit screen parameters. A3
sets/gets the film conditioning parameters. A4 sets/gets the
deposit controls parameters.
To Get Film Parameters send the command (i.e., A1), a space,
the film number, a question mark, then a series of spaces and
parameter numbers. You may include as many parameters as
you want, in whatever order you want. The format of the return
string is a series of parameter numbers, a comma, and its value,
separated by spaces.
To Set Film Parameters send the command, a space, the film
number, then a series of parameter numbers, a comma, and the
parameter value.
Parameters: . . . . A1: FilmName
A2: 1 P Term 7 Crystal Quality, Rate Dev %
2 I Term 8 Crystal Stability, Single Freq Shift
3 D Term 9 Xtal Fail Mode (obsolete)
4 Material # 10 Crystal Quality, Max Count
5 Pocket* 11 Crystal Stability, Total +Freq Shift
6 Tooling
A3: 1 Ramp1 Power 7 Idle Power
2 Ramp1 Time 8 Idle Ramp
3 Soak1 Time 9 Feed Power
4 Ramp2 Power 10 Feed Ramp
5 Ramp2 Time 11 Feed Time
6 Soak2 Time