INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 52)

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SQC-310 Operating Manual
Slew Rate: The maximum power change allowed on an output, per second. If
power or rate ramps exceed this value, an error will occur.
Rate Dev. Attention: The % rate deviation that triggers an attention alarm. The
default value of 0% disables this function.
Rate Dev. Alert: The % rate deviation that triggers an alert alarm. The default
value of 0% disables this function.
Rate Dev. Alarm: The % rate deviation that triggers an alarm. The default value of
0% disables this function.
Ramp 1: During the deposition of a layer, it may be desirable to change the
deposition rate. For example, you may want to deposit slowly at first, then increase
the rate once an initial thickness is reached. Enabling rate ramps provides that
capability. Once enabled, these parameters are added to the list.
Start Thickness: The deposited thickness at which the new rate will begin.
Ramp Time: Time allowed for the rate to change from initial rate to new rate.
New Rate: The rate of deposition, which is reached at the end of Ramp 1.
Ramp 2 / Ramp3: Three rate ramps are available for each layer. Ramps 2 and 3
both have Start Thickness, Ramp Time, and New Rate parameters similar to those
described above for Ramp 1. The start thickness for Ramp 2 should be greater than
the start thickness for Ramp 1. Likewise, the start thickness for Ramp 3 should be
greater than the start thickness for Ramp 2.
3.8 Layer Copy, Insert and Delete Menus
Copy, Delete and Insert are used to build and edit a sequence of process layers.
The Layer Select Menu, see Figure 3-6 , shows a process consisting of four layers.
The first three layers will be co-deposited with Layer 1 (note the indentation of
layers 2 and 3). The fourth layer will be deposited after layers 1-3 are codeposited.