9 depositing a film – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
1.9 Depositing a Film
NOTE: You can simulate the steps below, without actually depositing a film, by
going to the System Menu and selecting Simulate Mode ON. Simulate
mode is useful for testing processes before applying power to the
evaporation supply. See
for detailed System
Menu information.
Please take time to review the remainder of this manual for detailed operational,
programming, and safety information.
Table 1-9 Depositing a Film
Verify Sensor
Operation
Press Next Menu until the Sensor Info option is shown.
Press Sensor Info to display the quartz sensor readings. Sensor 1
should be ON and display a % life of over 50%. If not, check your
sensor connections (see
), and refer to
Min/Max Frequency (
Press Exit to return to the main screen.
Show
Power Graph
Press the Next Graph SoftKey until the graph shows Power (% vs.
Time).
Verify Output
Operation
Press the Next Menu SoftKey until the Auto/Manual SoftKey is
displayed. Now press Auto/Manual until Manual/Auto is displayed.
Press Start Layer to begin deposition in manual mode.
Slowly turn the control knob to increase the control voltage to your
evaporation supply. Verify that the Power(%) reading for Output 1
(lower right, below graph) approximates the actual output of your
evaporation supply. If not, check your hookup (see
), and refer to Scale Voltage (
CAUTION
Observe the output power versus your
evaporation supply’s actual output. If
there is a problem, press the Stop
SoftKey immediately.
Enter
Auto Mode
Press the Next Menu key until the Manual/Auto SoftKey is shown.
Press Manual/Auto to change the SoftKey display to Auto/Manual.
This places the output under PID deposition control.
Press Stop at any time to halt deposition and set output power to
zero.