INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 20)

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SQC-310 Operating Manual
The cycle can be broken into three distinct phases:
 Pre-conditioning (ramp/soak)
 Deposition
 Post-conditioning (feed/idle)
During pre-conditioning, power is supplied in steps to prepare the evaporation
source for deposition. Once the material is near the desired deposition rate,
material deposition begins.
During deposition, the PID loop adjusts the evaporation source power as required
to maintain the desired rate. In Co-deposition, multiple films can be deposited
simultaneously.
When the desired thickness is reached, the evaporation source is set to idle power.
At this point the process may be complete, or deposition of another layer may
begin.
1.8 Building a Process
This section presents a brief guide to building and running a simple one layer
process.
Chapter 2 covers instrument operation in much greater detail.
CAUTION
Be sure to exit to the Main Menu before powering the
instrument down if you have made changes to settings.
Your changes may not be saved otherwise.
Table 1-5 Create a Film
Create a
Film A film is a material to be deposited, and its associated deposition
settings. Initially the list of films may be empty.
Press Next Menu until the Film Menu SoftKey is displayed. Press
Film Menu to view a list of stored films. Turn the control knob to
scroll to an entry in the list that is currently labeled <Empty>.
Press the Create SoftKey to create a default film at that location.
Note the film number that you just created. For now, accept the
default film parameters.
Press Main Screen to return to the main screen.