INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 87)

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SQC-310 Operating Manual
Parameters: Insert a NonCoDep Layer in this Process
Insert a CoDep Layer in this Process.
Format: . . . . . . . . CC[Process#] [LayerPosition#] [Film#]? [Parameter]
Example: . . . . . . CC1 2 9? 1
Returns: A1,1
5.3.5 Get/Set Layer Parameters
Command: . . . . . D
Description: . . . . Most layer parameters are directly related to a setting on the
layer edit screen. You can get/set multiple layer parameters as
explained in Film Parameters.
Parameters: 1 Init Rate 16. Ramp1 Time
2 Final Thickness 17. Ramp2 Enable
3 Time SetPoint 18. Ramp2 Start
4 Thickness Limit 19. Ramp2 Rate
5 Start Mode 20. Ramp2 Time
6 Output 21. Film Number
7 Max. Power 24. Layer Available
8 Slew rate 25. Min. Power
9 Sensor 1 26. Power Alarm Dev (sec.)
10 Sensor 2 27. Rate Dev. Attention
11 Sensor 3 28. Rate Dev. Alert
12 Sensor 4 29. Rate Dev. Alarm
13. Ramp1 Enable
14. Ramp1 Start
15. Ramp1 Rate
Command: . . . . . DA
Description: . . . . Gets/Sets the parameters for the given layer as specified by the
given process number, layer number in the process, and the
assigned source number.
Parameters: (same as above)
1 Init Rate 16. Ramp1 Time
2 Final Thickness 17. Ramp2 Enable
3 Time SetPoint 18. Ramp2 Start
4 Thickness Limit 19. Ramp2 Rate
5 Start Mode 20. Ramp2 Time