INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 97)

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SQC-310 Operating Manual
5.3.21 Set Run State
Command: . . . . . U
Description: . . . . Sets the instruments operating state.
Parameters:
0 = Start Process 32 = Zero Thickness
1 = Stop Process 33 = Zero Time
2 = Start Layer 38 = SoakHold Enable
3 = Stop Layer 39 = SoakHold Disable
4 = Next Layer
5 = Force Final Thickness
Example: . . . . . . To start the active process, send: U0
5.3.22 Get Run State
Command: . . . . . V
Description: . . . . Returns the Phase #, Process Elapsed Time (as shown on
display), Process #, and Active Layer of the active process.
Parameters:
0 = Stopped
13 = Deposit 26 = Manual Power
1 = Crystal Verify 14 = Rate Ramp 27 = Snsr Feedback Timeout
2 = Initialize Layer 15 = Rate Ramp Deposit 28 = Src Feedback Timeout
3 = Manual Start Layer 16 = Timed Power 29 = Invalid Crystal Position
4 = Crystal Rotate 17 = Rate Sample Hold 30 = Invalid Pocket Position
5 = Pocket Rotate 18 = Rate Sample 31 = Sample Hold
6 = PreCond (CoDep only)19 = Crystal Switch 32 = Sampel Continuous
7 = Ramp1 20 = Feed Ramp 33 = Crystal Fail, Halted
8 = Soak 1 21 = Feed Soak 34 = Next Crystal
9 = Ramp 2 22 = Idle Ramp
10 = Soak 2 23 = Start Next layer
11 = Soak Hold 24 = Crystal Fail
12 = Shutter Delay 25 = Stop Layer
Example: . . . . . . To read the run state, send: V
The return string for the Deposit Phase, Elapsed Time =15
seconds, Active Process #1, Layer #2 is: 13 15 1 2
Command: . . . . . VA
Description: . . . . Gets the on/off status of each possible alarm.