INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
2. error code returned
a. A = illegal command
a. the command sent was
not valid; verify command
syntax as shown in the
instrument’s manual
(placement of spaces within
the command string are
important)
b. B = illegal value
b. the parameter’s value
sent is outside the range for
the given parameter, verify
parameter’s range
c. C = illegal ID
c. the command sent was
for a parameter which
doesn’t exist; verify the
correct parameter number
d. D = illegal command
format
d. the command sent is not
valid; verify command
syntax as shown in the
instrument’s manual
(placement of spaces within
the command string are
important)
e. E = no data to retrieve
e. some parameters may
not be in use, depending on
the value of other
parameters
Table 6-3 Troubleshooting Computer Communications (continued)
SYMPTOM
CAUSE
REMEDY